TiO 2 nanowires (NWs) have been synthesized by glancing angle deposition technique using e-beam evaporator. The average length 490 nm and diameter 80 nm of NWs were examined by field emission-scanning electron microscopy. Transmission electron microscopy emphasized that the NWs were widely dispersed at the top. X-ray diffraction has been carried out on the TiO 2 thin film (TF) and NW array. A small blue shift of 0.03 eV was observed in Photoluminescence (PL) main band emission for TiO 2 NW as compared to TiO 2 TF. The high temperature annealing at 980°C partially removed the oxygen vacancy from the sample, which was investigated by PL and optical absorption measurements. Copyright © 2012 American Scientific Publishers.