The frequency dependence of forward capacitance-voltage characteristics of Schottky barrier diodes were investigated by considering the series resistance effect. It is seen that in presence of a series resistance, the capacitance-voltage plot exhibits a peak. The peak value of the capacitance is found to vary with series resistance, interface state density and the frequency of the a.c. signal. The effect of series resistance on the capacitance is found appreciable at higher frequencies when capacitance decreases rapidly with frequency. On the other hand, the conductance of the diode increases with frequency in the high frequency limit. Such a variation in conductance limits the use of well known conductance technique to determine interface state density. © 1993.