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Common path polarization phase-shifting interference microscope for surface profilometry
C. Sengupta, S. Sarkar,
Published in SPIE
Volume: 59
Issue: 7
The development of a laser-based quantitative phase microscope with phase-shifting capability is reported. The proposed arrangement utilizes a suitably converging laser beam to illuminate the sample, a long working distance microscope objective, a wire grid polarizer to generate collinearly propagating and orthogonally polarized sample and reference beams, and polarizing devices for polarization phase shifting. Reorientation of a polarizer will revert the microscope back to a standard bright-field microscope that can be used for viewing the object under test. © 2020 Society of Photo-Optical Instrumentation Engineers (SPIE).
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