In this work, we present a core model of terminal charge and intrinsic capacitances of InAs-on-Si MOS transistors. The eigenenergy and corresponding wavefunctions are deduced by solving time independent Schrödinger wave equation inside the finite potential well. A second-order non-parabolic correction to the sub-band energy, effective mass of electron, and conduction band density of states have been employed and incorporated into the core model. The developed model effectively captures the variation in gate capacitance and reproduce the staircase like capacitance-voltage characteristics. Effect of conduction band nonparabolicity on gate capacitance is studied for different band-nonparabolicity factor. The model is validated with self-consistent Schrödinger-Poisson solver predicted result for different drain bias and channel thicknesses. The model calculated results are in a reasonable agreement with numerical simulation data. The SPICE compatibility of our model is demonstrated through Verilog-AMS implementation of the model and SPICE simulation of two benchmark circuits. © 2021 Elsevier Ltd